Near-infrared spectrometer new use of MEMS technology to reduce the size

[China Instrument Network Instrument Development] The German Institute of Electron Nanosystems (ENAS) in Germany and TU Chemnitz have jointly studied how to reduce large-scale and cumbersome laboratory equipment to micrometers or nanometers. Scale. Last week, at SEMICON Europe in Dresden, researchers demonstrated the latest micro- and nanometer spectrometers based on micro-electromechanical systems (MEMS) reflection and diffraction shutters.


Fraunhofer has developed a hand-held handheld near-infrared spectrometer that uses MEMS technology to reduce size and price, replacing the large, expensive equipment used today.

The Fraunhofer Gesellschaft (Fraunhofer Gesellschaft) has 67 institutions all over Germany. Each organization focuses on different applications and technologies. It employs 23,000 scientists and engineers and has a research and development budget of up to 2 billion U.S. dollars, 30% of which come from Government funding, and the other 70% comes from cooperation with the industry.

MEMS-based spectrometers come in two sizes - small and microscale. Larger models have about one-third of the shoebox (by contrast, the existing laboratory spectrometers are the same size as the trunk) and use MEMS optical interference filters to cover 3-11 micron wavelengths. Depending on the level of interference used, a full-width/half-height (FWHW) bandwidth can reach approximately nanometers of 50-200 nm.


Complete MEMS spectrometer detection module in TO-8 package

The electronically adjustable passband utilizes two equal and movable reflective carriers to achieve a maximum transmission of more than 70%, which minimizes the vibration and gravity forces exerted on the reflection interval.


The smallest Fabry-Perot interferometer (FPI) chip size currently used in miniature spectrometers is approximately 7mm x 7mm x 0.6mm

Larger spectrometers can be used to replace spectrometers in the laboratory that do not require the highest sensitivity or spectral range, or as an alternative to spectrometers for specific applications. Other applications include industrial process spectrometers, biogas plant control, fuel monitoring systems, and food quality analysis.

The smaller spectrometer is based on the Fabry-Perot Interferometer (FPI), which creates a small size that fits into the TO-8 package. The FPI chip size is 7 x 7 x 0.6mm2 and is used to extend the functionality of standard fixed-wavelength multi-color infrared detectors. Its extremely low price and small size make it suitable for a wide range of applications in infrared spectroscopy, including spectral imaging, medical measurement, industrial gas analyzers, ATR sensors, hand-held analyzers, sensor nets, warnings and safety System and so on.

(Original title: MEMS spectrometers substantially reduce laboratory equipment)

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